Dynamic analysis of bifurcating, non-linear thin film micro-structures
نویسنده
چکیده
As micro-device application in consumer and commercial products develops, efficient tools are required to simulate device dynamics and assess structural performance. An integrated methodology is developed for studying the dynamics of thin film bifurcating structures. Results are presented for a generic thin film structure, which exhibit classical electro-mechanical hysteresis. Such structures can be used to produce light modulating micro-electro-mechanical system (MEMS) devices. # 2004 Elsevier Ltd. All rights reserved.
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